He was referring to rival source power technology from various vendors, namely Cymer Inc. (San Diego). Philips Extreme UV and Xtreme technologies announced cooperation on EUV sources in October 2007. Both companies supplied all the EUV sources for the alpha-phase of the EUV-based lithography tools.

This entry was posted on Tuesday, February 12th, 2008 at 1:07 am and is filed under Headsets. You can follow any responses to this entry through the RSS 2.0 feed. You can leave a response, or trackback from your own site.